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PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films2023 arXiv (Cornell University) preprint Engineering Membrane Separation and Gas Transport Open access
Teresa de los Arcos, Peter Awakowicz, Marc Böke, Nils Boysen, Ralf Peter Brinkmann, Rainer Dahlmann, +16 more
1citations
5 results