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Papers matching “magnetron sputtering” 12

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Enhancement of Ionised Metal Flux Fraction Without Compromising Deposition Rate in Industrial Magnetron Sputtering
2024 SSRN Electronic Journal preprint Engineering Metal and Thin Film Mechanics Open access

Peter Klein, Jaroslav Hnilica, Matej Fekete, Petr Vašina, Pavel Souček, Vjačeslav Sochora

0

citations
Structural and electrical properties of fiber textured and epitaxial molybdenum thin films prepared by magnetron sputter epitaxy
2024 arXiv (Cornell University) preprint Engineering Acoustic Wave Resonator Technologies Open access

Balasubramanian Sundarapandian, Mohit Raghuwanshi, Patrik Straňák, Yuan Yu, Haiyan Lyu, Mario Prescher, +2 more

0

citations
Sputtered Aluminum Nitride Waveguides for the Telecommunication Spectrum with less than 0.16 dB/cm loss
2024 preprint Engineering Photonic and Optical Devices Open access

Max C. Lemme, Radhakant Singh, Mohit Raghuwanshi, Balasubramanian Sundarapandian, Rijil Thomas, Lutz Kirste, +1 more

0

citations
Sputtered Aluminum Nitride Waveguides for the Telecommunication Spectrum with less than 0.16 dB/cm loss
2024 preprint Engineering Photonic and Optical Devices Open access

Max C. Lemme, Radhakant Singh, Mohit Raghuwanshi, Balasubramanian Sundarapandian, Rijil Thomas, Lutz Kirste, +1 more

0

citations
Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices
2024 arXiv (Cornell University) preprint Engineering Acoustic Wave Resonator Technologies Open access

Jyotish Patidar, Kerstin Thorwarth, Thorsten Schmitz-Kempen, Roland Kessels, Sebastian Siol

0

citations
Thermal Stability and Mechanical Properties of Sputtered (Hf,Ta,V,W,Zr)-Diborides
2020 SSRN Electronic Journal preprint Engineering Metal and Thin Film Mechanics Open access

A. Kirnbauer, Antonia Wagner, Vincent Moraes, Daniel Primetzhofer, M. Hans, Jochen M. Schneider, +2 more

2

citations
Phase Evolution, Structure and Mechanical Properties of CrHfMoTaW–N High-entropy Thin Films Deposited by Reactive HiPIMS
2026 SSRN Electronic Journal preprint Engineering High Entropy Alloys Studies Open access

Pavel Souček, Lukáš Vrána, Matej Fekete

0

citations
Exploring Different Strategies of Multipulse Hipims
2024 SSRN Electronic Journal preprint Engineering Metal and Thin Film Mechanics Open access

Jaroslav Hnilica, Pavel Souček, Martin Ondryáš, Matej Fekete, Petr Vašina

0

citations
Fe Modified Craln Coatings for Tribological Applications
2025 SSRN Electronic Journal preprint Engineering Metal and Thin Film Mechanics Open access

Kirsten Bobzin, C. Kalscheuer, Max Philip Möbius, Martin Welters

0

citations
Formation of 3d-Cr2(C1-Yoy) at Cr2alc / Alox Interfaces
2025 SSRN Electronic Journal preprint Engineering Metal and Thin Film Mechanics Open access

Rajib Sahu, Dimitri Bogdanovski, Clio Azina, Ganesh Kumar Nayak, Jochen M. Schneider, Christina Scheu

0

citations
High Strength and Plasticity of AlxCoCrFeNi/Al2O3 High-Entropy Alloy Asymmetric Nanolaminates
2026 SSRN Electronic Journal preprint Engineering High Entropy Alloys Studies Open access

Samuel F. Bojarski, S.J. Tsianikas, Chunhua Tian, See PDF

0

citations
Microscale deformation of intermetallic-Mg interface under shear loading
2024 arXiv (Cornell University) preprint Engineering Intermetallics and Advanced Alloy Properties Open access

Anwesha Kanjilal, Shamsa Aliramaji, Deborah Neuß, Marcus Hans, Jochen M. Schneider, James P. Best, +1 more

0

citations

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