December 01, 1995 article Excimer laser: a new tool for precision micromachining Optical and Quantum Electronics DOI: 10.1007/bf00326485 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 26 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Industrial Laser Systems 2023 RWTHedition book-chapter Engineering Laser Design and Applications 1 citations 1 result References 0