December 01, 2011 article Open access Detection of Shallow Dislocations on 4H-SiC Substrate by Etching Method Acta Physica Polonica A DOI: 10.12693/aphyspola.120.a-25 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 5 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Combining unsupervised and supervised learning in microscopy enables defect analysis of a full 4H-SiC wafer 2024 MRS Communications article Engineering Industrial Vision Systems and Defect Detection Open access cited by 1 patent 8 citations 1 result References 0