May 29, 2026 article Open access An Integrated Physics-Based and Data-Driven Framework for Defect Prediction in Advanced Nanoimprint Lithography Toward Inorganic Semiconductor Patterning Micromachines DOI: 10.3390/mi17060674 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 1 References 1 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Uncertainty Quantification Based on Bayesian Neural Networks for Predictive Quality 2022 Springer eBooks book-chapter Engineering Fault Detection and Control Systems 8 citations 1 result