May 20, 2026 article A Boundary-Aware Surrogate Model for Predicting Feature-Scale TiN Etching Profiles IEEE Transactions on Semiconductor Manufacturing DOI: 10.1109/tsm.2026.3695310 OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 0 References 1 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Metrics reloaded: recommendations for image analysis validation 2024 Nature Methods article Computer Science Medical Image Segmentation Techniques Open access 468 citations 1 result