Towards quantitative evaluation of grazing-incidence X-ray diffraction data

Acta Crystallographica Section A Foundations and Advances, vol. 81, pp. e112

Abstract

Grazing incidence X-ray diffraction (GIXD) is widely used for the structural characterisation of thin films, particularly for analysing the phase composition and the orientation distribution of crystallites [1].While qualitative evaluation tools are well established [2], a widely applicable and systematic procedure for extracting quantitative information has not yet been developed.

Authors 8

1. F. Gasser

   Graz University of Technology

   Affiliation as printed

   Institute of Solid State Physics , Graz University of Technology , Petersgasse 16 , 8010 Graz , Austria,

2. S. John

   Graz University of Technology

   Affiliation as printed

   Institute of Solid State Physics , Graz University of Technology , Petersgasse 16 , 8010 Graz , Austria,

3. J. Smets

   KU Leuven

   Affiliation as printed

   Center of Membrane Separations, Adsorption, Catalysis and Spectroscopy (cMAXS) , KU Leuven , Celestijnenlaan 200f , 3001 Leuven , Belgium,

4. J. Simmbrunner
5. M. Fratschko

   Graz University of Technology

   Affiliation as printed

   Institute of Solid State Physics , Graz University of Technology , Petersgasse 16 , 8010 Graz , Austria,

6. R. Ameloot

   KU Leuven

   Affiliation as printed

   Center of Membrane Separations, Adsorption, Catalysis and Spectroscopy (cMAXS) , KU Leuven , Celestijnenlaan 200f , 3001 Leuven , Belgium,

7. H.-G. Steinrück Aachen Institute of Physical Chemistry

   Forschungszentrum Jülich · RWTH Aachen University

   Affiliation as printed

   Institute for a Sustainable Hydrogen Economy (INW) , Forschungszentrum Jülich GmbH , Marie-Curie- Straße 5 , 52428 Jülich , Germany,

   Institute of Physical Chemistry , RWTH Aachen University , Landoltweg 2 , 52074 Aachen , Germany

8. R. Resel

   Graz University of Technology

   Affiliation as printed

   Institute of Solid State Physics , Graz University of Technology , Petersgasse 16 , 8010 Graz , Austria,