February 05, 2026 article Open access PVD magnetron sputtering for coating thickness reference materials: a comprehensive review (1974–2025) Materials Research Express DOI: 10.1088/2053-1591/ae429d Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 3 References 2 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Determination of mechanical properties of physical vapor deposition tool coatings using machine learning 2025 Wear article Engineering Metal and Thin Film Mechanics Open access 7 citations Instrumentation and uncertainty evaluation for absolute characterization of thin films and nanostructured surfaces in advanced optical metrology 2025 Metrologia article Decision Sciences Scientific Measurement and Uncertainty Evaluation Open access 5 citations 2 results