CMOS-compatible Plasmo-Photonic Integrated Circuit with Record-high Temperature Sensitivity

Abstract

A record high +23.86 nm/℃ sensitivity is demonstrated by an integrated plasmo-photonic bimodal interferometric temperature sensor. Fabricated on the SU-8 photonic platform, the PIC features an Al plasmonic sensing waveguide for scalable, low-cost CMOS-compatible production. .

Authors 13

1. Lamprini Damakoudi

   Aristotle University of Thessaloniki

   Affiliation as printed

   Department of Physics - CIRI, Aristotle University of Thessaloniki, Greece

2. Stelios Simos

   Aristotle University of Thessaloniki

   Affiliation as printed

   Department of Informatics - CIRI, Aristotle University of Thessaloniki, Greece

3. Konstantinos Fotiadis

   Aristotle University of Thessaloniki

   Affiliation as printed

   Department of Informatics - CIRI, Aristotle University of Thessaloniki, Greece

4. Dimosthenis Spasopoulos

   Aristotle University of Thessaloniki

   Affiliation as printed

   Department of Informatics - CIRI, Aristotle University of Thessaloniki, Greece

5. E. Chatzianagnostou

   Aristotle University of Thessaloniki

   Affiliation as printed

   Department of Informatics - CIRI, Aristotle University of Thessaloniki, Greece

6. Omkar Bhalerao Aachen AMO GmbH Chair of Electronic Devices

   AMO (Germany) · RWTH Aachen University

   Affiliation as printed

   AMO GmbH, Otto-Blumenthal-Str. 25, Aachen, 52074, Germany

   Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal Str. 25, Aachen, 52074, Germany

7. Stephan Suckow Aachen AMO GmbH

   AMO (Germany)

   Affiliation as printed

   AMO GmbH, Otto-Blumenthal-Str. 25, Aachen, 52074, Germany

8. Max C. Lemme Aachen AMO GmbH Chair of Electronic Devices

   AMO (Germany) · RWTH Aachen University

   Affiliation as printed

   AMO GmbH, Otto-Blumenthal-Str. 25, Aachen, 52074, Germany

   Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal Str. 25, Aachen, 52074, Germany

9. Dimitris V. Bellas

   University of Ioannina

   Affiliation as printed

   Department of Materials Science and Engineering, University of Ioannina, Ioannina, 45110, Greece

10. Eleftheria Lampadariou

    University of Ioannina

    Affiliation as printed

    Department of Materials Science and Engineering, University of Ioannina, Ioannina, 45110, Greece

11. Elefterios Lidorikis

    University of Ioannina

    Affiliation as printed

    Department of Materials Science and Engineering, University of Ioannina, Ioannina, 45110, Greece

12. Nikos Pleros

    Aristotle University of Thessaloniki

    Affiliation as printed

    Department of Informatics - CIRI, Aristotle University of Thessaloniki, Greece

13. K. Vyrsokinos

    Aristotle University of Thessaloniki

    Affiliation as printed

    Department of Physics - CIRI, Aristotle University of Thessaloniki, Greece