Sensitivity-optimized waveguide-based methane gas sensor in the mid-IR

Abstract

We demonstrate methane gas sensing using suspended silicon waveguides and experimentally validate the sensitivity optimization of waveguide-based gas sensors by varying waveguide lengths. This method enables application-optimized integrated optical gas sensors.

Authors 10

1. Pen-Sheng Lin

   KTH Royal Institute of Technology

   Affiliation as printed

   Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden

2. Arne Quellmalz

   KTH Royal Institute of Technology

   Affiliation as printed

   Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden

3. Po‐Han Huang

   KTH Royal Institute of Technology

   Affiliation as printed

   Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden

4. Shayan Parhizkar Aachen AMO GmbH Advanced Microelectronic Center Aachen Chair of Electronic Devices

   AMO (Germany) · RWTH Aachen University

   Affiliation as printed

   AMO GmbH, Advanced Microelectronic Center Aachen, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany

   Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany

5. Nour Negm Aachen AMO GmbH Advanced Microelectronic Center Aachen Chair of Electronic Devices

   AMO (Germany) · RWTH Aachen University

   Affiliation as printed

   AMO GmbH, Advanced Microelectronic Center Aachen, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany

   Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany

6. Stephan Suckow Aachen AMO GmbH Advanced Microelectronic Center Aachen

   AMO (Germany)

   Affiliation as printed

   AMO GmbH, Advanced Microelectronic Center Aachen, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany

7. Floria Ottonello Briano

   SenseAir (Sweden)

   Affiliation as printed

   Senseair AB, Stationsgatan 12, Delsbo, Sweden

8. Max C. Lemme Aachen AMO GmbH Advanced Microelectronic Center Aachen Chair of Electronic Devices

   AMO (Germany) · RWTH Aachen University

   Affiliation as printed

   AMO GmbH, Advanced Microelectronic Center Aachen, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany

   Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany

9. Frank Niklaus

   KTH Royal Institute of Technology

   Affiliation as printed

   Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden

10. Kristinn B. Gylfason

    KTH Royal Institute of Technology

    Affiliation as printed

    Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden