February 25, 2024 article Open access The Effects of Etchant on via Hole Taper Angle and Selectivity in Selective Laser Etching Micromachines DOI: 10.3390/mi15030320 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 3 stored of 14 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Topographical evolution and simulation of SLE-fabricated fused silica surfaces in spray-burner nozzles during chemical etching 2026 Optics Express article Engineering Laser Material Processing Techniques Open access 0 citations Topographical evolution and simulation of SLE-fabricated fused silica surfaces in spray-burner nozzles during chemical etching 2026 Optics Express article Engineering Laser Material Processing Techniques Open access 0 citations Influence of flexible multibeam intensity distributions on selective laser-induced etching process regimes 2024 Optics Express article Engineering Laser Material Processing Techniques Open access 5 citations 3 results References 0