January 01, 2023 article Open access Deep Learning-based Sequence Modeling for Advanced Process Control in Semiconductor Manufacturing IFAC-PapersOnLine DOI: 10.1016/j.ifacol.2023.10.058 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 4 References 1 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Temporal convolutional autoencoder for unsupervised anomaly detection in time series 2021 Applied Soft Computing article Computer Science Anomaly Detection Techniques and Applications Open access 220 citations 1 result