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October 04, 2023 book-chapter Aachen paper

Thin and Thick Film Processing

RWTHedition, pp. 503–517

DOI: 10.1007/978-3-030-98323-9_19 OpenAlex

Authors 1

  1. Christian Vedder corresponding Aachen Fraunhofer ILT

    Fraunhofer Institute for Laser Technology

    Affiliation as printed

    Fraunhofer ILT, Aachen, Germany

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