CALPHAD-based modelling of the temperature-composition-structure relationship during physical vapor deposition of Mg-Ca thin films

RWTH Publications (RWTH Aachen)

Abstract

The temperature-dependent composition and phase formation during physical vapor deposition (PVD) of Mg-Ca thin films is modelled using a CALPHAD-based approach. Considering the Mg and Ca sublimation fluxes calculated based on the vapor pressure obtained by employing equilibrium thermochemical calculations, experimentally observed synthesis temperature trends in thin film composition and phase formation are reproduced. The model is a significant step towards understanding how synthesis parameters control composition and thereby phase formation in PVD of metals with high vapor pressures.

Authors 4

1. Philipp Keuter Aachen Materials Chemistry

   GTT-Technologies (Germany) · RWTH Aachen University

   Affiliation as printed

   GTT-Technologies , Kaiserstraße 103 , Herzogenrath 52134 , Germany;

   Materials Chemistry , RWTH Aachen University , Kopernikusstr. 10 , 52074 Aachen , Germany;

2. Moritz to Baben

   GTT-Technologies (Germany)

   Affiliation as printed

   GTT-Technologies , Kaiserstraße 103 , Herzogenrath 52134 , Germany;

3. Shamsa Aliramaji Aachen Materials Chemistry

   RWTH Aachen University

   Affiliation as printed

   Materials Chemistry , RWTH Aachen University , Kopernikusstr. 10 , 52074 Aachen , Germany;

4. Jochen M. Schneider Aachen Materials Chemistry

   RWTH Aachen University

   Affiliation as printed

   Materials Chemistry , RWTH Aachen University , Kopernikusstr. 10 , 52074 Aachen , Germany;