Multiscale model for ultrashort pulsed parallel laser structuring—Part III. Characterization of material properties

Optical Engineering, vol. 61, pp. 1–19

Abstract

In the field of microstructuring and nanostructuring ultrashort pulsed (USP) laser processing attracts increasing attention due to its ability to generate high-precision structures. A simulation of the USP process can lead to a reduced process development time and help to achieve a better geometrical quality of the manufactured microstructures. To predict the ablation shape, temperature distribution, and distortion in a USP ablation process, a detailed simulation of the physical processes during and after the laser ablation is required. Different simulation tools such as multiscale simulations are already established but still need different and accurate input parameters regarding the material properties of the workpiece to be machined. A material characterization procedure that can be used in a standardized way for different materials and processing stations needs to be developed. The procedure determines the absorption coefficient, penetration depth, and ablation threshold precisely matched to a USP machine and the material used. Based on the material characterization procedure a calibration of the used simulation has to be carried out as precisely as possible. The simulation can then be applied for a digital process development and subsequently validated with specific experiments.

Authors 3

1. Thilo Barthels corresponding Aachen Fraunhofer-Institut für Lasertechnik ILT Fraunhofer ILT

   Fraunhofer Institute for Laser Technology

   Affiliation as printed

   Fraunhofer-Institut für Lasertechnik ILT

   Fraunhofer ILT, Aachen, Germany

2. Markus Nießen Aachen Fraunhofer-Institut für Lasertechnik ILT Fraunhofer ILT

   Fraunhofer Institute for Laser Technology

   Affiliation as printed

   Fraunhofer-Institut für Lasertechnik ILT

   Fraunhofer ILT, Aachen, Germany

3. Christian Heinigk Aachen Department NLD

   RWTH Aachen University

   Affiliation as printed

   RWTH Aachen Univ

   RWTH Aachen University, Department NLD, Aachen, Germany