W4298019739 OpenAlex Authors 0 Author list not loaded yet. Cited by 3 stored of 0 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Impurity sources and incorporation pathways during sputter deposition of Mg and Al thin films 2025 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics Open access 7 citations Comparison of HMDSO and HMDSN as precursors for high‐barrier plasma‐polymerized multilayer coating systems on polyethylene terephthalate films 2021 Plasma Processes and Polymers article Materials Science Diamond and Carbon-based Materials Research Open access 18 citations In situ X-ray measurements over large Q-space to study the evolution of oxide thin films prepared by RF sputter deposition 2020 Journal of Materials Science article Materials Science Ferroelectric and Piezoelectric Materials Open access 4 citations 3 results References 0