High-throughput ultrafast laser micromachining with multiple parallel spots

Conference on Lasers and Electro-Optics, vol. 24, pp. AM3I.3

Abstract

The parallel use of a large number of ultrashort pulsed laser beams with individual power modulation creates a completely new digital controllable tool in surface processing. High performance ultrashort pulsed lasers allow the material independent processing in nanometer accuracy, even for large components.

Authors 3

1. Stephan Bruening corresponding
   Affiliation as printed

   Schepers GmbH & Co. KG, Karl-Benz Str. 7, 48691 Vreden, Germany

2. Keming Du corresponding

   EdgeWave (Germany)

   Affiliation as printed

   Edgewave GmbH, Carlo-Schmid Str. 19, 52146 Würselen, Germany

3. Arnold Gillner corresponding Aachen Fraunhofer ILT

   Fraunhofer Institute for Laser Technology

   Affiliation as printed

   Fraunhofer ILT, Steinbachstr. 15, 52074 Aachen, Germany