Ultra‐precise surface structuring in nanometer scale

Vakuum in Forschung und Praxis, vol. 34, pp. 47–49

Abstract

Summary Manufacturing of large scale function‐alized and structured surfaces require special production processes and machines. Important criteria for those surfaces are the realized surface roughness and contour accuracy. Typical structures for optical applications with a high quality demand are V‐grooves, pyramidal and fresnel geometries. The initial mastering process is decisive for the quality in the consecutive replication processes like thermal‐ or UV‐Nanoimprint. Ultra‐precision diamond turning can be seen as one efficient methodology for the creation of large area structured drums with a high surface quality.

Authors 4

1. Sebastian Dormann corresponding Aachen

   Fraunhofer Institute for Production Technology IPT

   Affiliation as printed

   Fraunhofer IPT Steinbachstraße 17 52074 Aachen

2. Maximilian Kosel Aachen

   RWTH Aachen University · Fraunhofer Institute for Production Technology IPT

   Affiliation as printed

   Year 1991. Study at Rheinisch-Westfälische Technische-Hochschule Aachen (RWTH Aachen). Scientific employee at Fraunhofer-Institute for production technology

3. Daniel Zontar Aachen

   RWTH Aachen University · Fraunhofer Institute for Production Technology IPT

   Affiliation as printed

   Year 1991. Study at Rheinisch-Westfälische Technische-Hochschule Aachen (RWTH Aachen). Scientific employee at Fraunhofer-Institute for production technology

4. Christian Brecher Aachen

   RWTH Aachen University · Fraunhofer Institute for Production Technology IPT

   Affiliation as printed

   Year 1991. Study at Rheinisch-Westfälische Technische-Hochschule Aachen (RWTH Aachen). Scientific employee at Fraunhofer-Institute for production technology