Simulation, fabrication, and characteristics of high-temperature, quick-response tungsten–rhenium thin-film thermocouples probe sensor

Measurement Science and Technology, vol. 33, pp. 105105

Abstract

Abstract In this study, a tungsten–rhenium thin-film thermocouples (TFTCs) is fabricated via magnetron sputtering on silicon carbide ceramics. Cuboid TFTCs probe is sealed with stainless steel shell to make the TFTCs probe sensor. This sensor has an average Seebeck coefficient of 27.2 µV °C −1 at 1167 °C (temperature difference). The thermal volatilization characteristics, electromotive force behavior, and response time of this tungsten–rhenium TFTC sensor are investigated. The real engine experimental results show that the TFTCs probe sensor can work normally under the high temperature and high-speed air flow environment of 4 Mach and 900 °C. In addition, the correlation between the response speed, substrate thickness, and film thickness is discussed based on simulations of the response to carbon dioxide laser pulses. As indicated by the dynamic experiment results, the laser response time is from 0.49 to 1.51 ms, which is much shorter than that of traditional armored C-type thermocouples (for tungsten–rhenium thermocouples, the response time is around 1 s). Tungsten–rhenium TFTCs probe sensor is a suitable alternative to conventional thermocouples to meet the requirements of measuring high temperatures with a quick response.

Authors 10

1. Zhongkai Zhang corresponding Aachen Institute of Materials in Electrical Engineering 1 Department of Micro- and Nano Electronics Faculty of Electrical Engineering and Information Technology

   Xi'an Jiaotong University · RWTH Aachen University

   Affiliation as printed

   Institute of Materials in Electrical Engineering 1, Department of Micro- and Nano Electronics, Faculty of Electrical Engineering and Information Technology, RWTH Aachen University, 52074 Aachen, Germany

   State Key Laboratory for Manufacturing Systems Engineering, Institute of Precision Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, People’s Republic of China

2. Shuimin Li corresponding

   Xi'an Jiaotong University

   Affiliation as printed

   State Key Laboratory for Manufacturing Systems Engineering, Institute of Precision Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, People’s Republic of China

3. Bian Tian corresponding

   Xi'an Jiaotong University

   Affiliation as printed

   State Key Laboratory for Manufacturing Systems Engineering, Institute of Precision Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, People’s Republic of China

4. Zhaojun Liu corresponding

   Xi'an Jiaotong University

   Affiliation as printed

   State Key Laboratory for Manufacturing Systems Engineering, Institute of Precision Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, People’s Republic of China

5. Jiangjiang Liu corresponding

   Xi'an Jiaotong University

   Affiliation as printed

   State Key Laboratory for Manufacturing Systems Engineering, Institute of Precision Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, People’s Republic of China

6. Gong Cheng corresponding

   Xi'an Jiaotong University

   Affiliation as printed

   State Key Laboratory for Manufacturing Systems Engineering, Institute of Precision Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, People’s Republic of China

7. Fan Xu corresponding

   Xi'an Jiaotong University

   Affiliation as printed

   State Key Laboratory for Manufacturing Systems Engineering, Institute of Precision Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, People’s Republic of China

8. Xudong Fang corresponding

   Xi'an Jiaotong University

   Affiliation as printed

   State Key Laboratory for Manufacturing Systems Engineering, Institute of Precision Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, People’s Republic of China

9. Na Zhao corresponding

   Xi'an Jiaotong University

   Affiliation as printed

   State Key Laboratory for Manufacturing Systems Engineering, Institute of Precision Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, People’s Republic of China

10. Libo Zhao corresponding

    Xi'an Jiaotong University

    Affiliation as printed

    State Key Laboratory for Manufacturing Systems Engineering, Institute of Precision Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, People’s Republic of China