Nanoscale tip positioning with a multi-tip scanning tunneling microscope using topography images

Review of Scientific Instruments, vol. 93, pp. 013702

Abstract

Multi-tip scanning tunneling microscopy (STM) is a powerful method to perform charge transport measurements at the nanoscale. With four STM tips positioned on the surface of a sample, four-point resistance measurements can be performed in dedicated geometric configurations. Here, we present an alternative to the most often used scanning electron microscope imaging to infer the corresponding tip positions. After the initial coarse positioning is monitored by an optical microscope, STM scanning itself is used to determine the inter-tip distances. A large STM overview scan serves as a reference map. Recognition of the same topographic features in the reference map and in small scale images with the individual tips allows us to identify the tip positions with an accuracy of about 20 nm for a typical tip spacing of ∼1μm. In order to correct for effects such as the non-linearity of the deflection, creep, and hysteresis of the piezoelectric elements of the STM, a careful calibration has to be performed.

Authors 4

1. Arthur Leis corresponding Aachen Experimentalphysik IV A

   Forschungszentrum Jülich · Jülich Aachen Research Alliance · RWTH Aachen University

   Affiliation as printed

   Experimentalphysik IV A, RWTH Aachen University 3 , Otto-Blumenthal-Straße, 52074 Aachen, Germany

   Jülich Aachen Research Alliance (JARA), Fundamentals of Future Information Technology 2 , 52425 Jülich, Germany

   Peter Grünberg Institut (PGI-3), Forschungszentrum Jülich 1 , 52425 Jülich, Germany

2. Vasily Cherepanov

   Forschungszentrum Jülich · Jülich Aachen Research Alliance

   Affiliation as printed

   Jülich Aachen Research Alliance (JARA), Fundamentals of Future Information Technology 2 , 52425 Jülich, Germany

   Peter Grünberg Institut (PGI-3), Forschungszentrum Jülich 1 , 52425 Jülich, Germany

3. Bert Voigtländer corresponding Aachen Experimentalphysik IV A

   Forschungszentrum Jülich · Jülich Aachen Research Alliance · RWTH Aachen University

   Affiliation as printed

   Experimentalphysik IV A, RWTH Aachen University 3 , Otto-Blumenthal-Straße, 52074 Aachen, Germany

   Jülich Aachen Research Alliance (JARA), Fundamentals of Future Information Technology 2 , 52425 Jülich, Germany

   Peter Grünberg Institut (PGI-3), Forschungszentrum Jülich 1 , 52425 Jülich, Germany

4. Frank Stefan Tautz Aachen Experimentalphysik IV A

   Forschungszentrum Jülich · Jülich Aachen Research Alliance · RWTH Aachen University

   Affiliation as printed

   Experimentalphysik IV A, RWTH Aachen University 3 , Otto-Blumenthal-Straße, 52074 Aachen, Germany

   Jülich Aachen Research Alliance (JARA), Fundamentals of Future Information Technology 2 , 52425 Jülich, Germany

   Peter Grünberg Institut (PGI-3), Forschungszentrum Jülich 1 , 52425 Jülich, Germany