December 09, 2021 article Open access Using Explainable Artificial Intelligence to Improve Process Quality: Evidence from Semiconductor Manufacturing Management Science DOI: 10.1287/mnsc.2021.4190 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 3 stored of 313 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Machine learning for metrology in manufacturing 2026 CIRP Annals article Engineering Advanced Measurement and Metrology Techniques Open access 3 citations Interpretation Framework of Predictive Quality Models for Process- and Product-oriented Decision Support 2023 Procedia CIRP article Computer Science Explainable Artificial Intelligence (XAI) Open access 11 citations Scalable Concept Extraction in Industry 4.0 2023 Communications in computer and information science conference-paper Computer Science Explainable Artificial Intelligence (XAI) 6 citations 3 results References 0