Efficient large field of view electron phase imaging using near-field electron ptychography with a diffuser

Ultramicroscopy, vol. 231, pp. 113257

Abstract

Most implementations of ptychography on the electron microscope operate in scanning transmission (STEM) mode, where a small focussed probe beam is rapidly scanned across the sample. In this paper we introduce a different approach based on near-field ptychography, where the focussed beam is replaced by a wide-field, structured illumination, realised through a purpose-designed etched Silicon Nitride window. We show that fields of view as large as 100 μm 2 can be imaged using the new approach, and that quantitative electron phase images can be reconstructed from as few as nine near-field diffraction pattern measurements.

Authors 6

1. Frederick Allars

   University of Sheffield

   Affiliation as printed

   Department of Electronic and Electrical Engineering, Sir Frederick Mappin Building, University of Sheffield, S3 7HQ, United Kingdom

2. Peng‐Han Lu Aachen

   Forschungszentrum Jülich · Ernst Ruska Centre · RWTH Aachen University

   Affiliation as printed

   Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute, Forschungszentrum Juelich, 52425 Juelich, Germany; RWTH Aachen University, 52074 Aachen, Germany

   Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute, Forschungszentrum Juelich, 52425 Juelich, Germany

   RWTH Aachen University, 52074 Aachen, Germany

3. Maximilian Kruth Aachen

   Forschungszentrum Jülich · Ernst Ruska Centre · RWTH Aachen University

   Affiliation as printed

   Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute, Forschungszentrum Juelich, 52425 Juelich, Germany; RWTH Aachen University, 52074 Aachen, Germany

   Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute, Forschungszentrum Juelich, 52425 Juelich, Germany

   RWTH Aachen University, 52074 Aachen, Germany

4. Rafal E. Dunin‐Borkowski

   Forschungszentrum Jülich · Ernst Ruska Centre

   Affiliation as printed

   Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute, Forschungszentrum Juelich, 52425 Juelich, Germany

5. John Marius Rodenburg

   University of Sheffield

   Affiliation as printed

   Department of Electronic and Electrical Engineering, Sir Frederick Mappin Building, University of Sheffield, S3 7HQ, United Kingdom

6. Andrew Maiden corresponding

   University of Sheffield

   Affiliation as printed

   Department of Electronic and Electrical Engineering, Sir Frederick Mappin Building, University of Sheffield, S3 7HQ, United Kingdom. Electronic address: a.maiden@sheffield.ac.uk

   Department of Electronic and Electrical Engineering, Sir Frederick Mappin Building, University of Sheffield, S3 7HQ, United Kingdom