March 27, 2019 article Scan angle error measurement based on phase-stepping algorithms in scanning beam interference lithography Applied Optics DOI: 10.1364/ao.58.002641 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 15 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Quantitative investigation on a period variation reduction method for the fabrication of large-area gratings using two-spherical-beam laser interference lithography 2022 Optics Express article Engineering Laser Material Processing Techniques Open access 13 citations 1 result References 0