April 01, 2016 article UV-NIL based nanostructuring of aluminum using a novel organic imprint resist demonstrated for 100nm half-pitch wire grid polarizer Microelectronic Engineering DOI: 10.1016/j.mee.2016.03.046 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 11 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Mid-IR diffraction gratings fabricated via nanoimprint lithography for chirped pulse amplification 2026 Research Square preprint Engineering Nanofabrication and Lithography Techniques Open access 0 citations 1 result References 0