November 17, 2009 article Open access Subnanometer Linewidth Uniformity in Silicon Nanophotonic Waveguide Devices Using CMOS Fabrication Technology IEEE Journal of Selected Topics in Quantum Electronics DOI: 10.1109/jstqe.2009.2026550 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 321 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Chip-to-Chip Orthogonal Delay-Division Multiplexed Network With Optically Enabled Equalization 2024 Journal of Lightwave Technology article Engineering Optical Network Technologies Open access 4 citations 1 result References 0