October 26, 2012 article High performance diffraction gratings made by e-beam lithography Applied Physics A DOI: 10.1007/s00339-012-7346-z OpenAlex Authors 0 Author list not loaded yet. Cited by 3 stored of 106 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Mid-IR diffraction gratings fabricated via nanoimprint lithography for chirped pulse amplification 2026 Research Square preprint Engineering Nanofabrication and Lithography Techniques Open access 0 citations Design of efficient high-order immersed metagratings using an evolutionary algorithm 2025 Optics Express article Materials Science Metamaterials and Metasurfaces Applications Open access 2 citations Quantitative investigation on a period variation reduction method for the fabrication of large-area gratings using two-spherical-beam laser interference lithography 2022 Optics Express article Engineering Laser Material Processing Techniques Open access 13 citations 3 results References 0