July 05, 1993 article Average energy deposited per atom: A universal parameter for describing ion-assisted film growth? Applied Physics Letters DOI: 10.1063/1.109742 OpenAlex Authors 0 Author list not loaded yet. Cited by 5 stored of 225 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Ion kinetic energy- and ion flux-dependent mechanical properties and thermal stability of (Ti,Al)N thin films 2023 Acta Materialia article Engineering Metal and Thin Film Mechanics Open access 26 citations Microstructure, grain boundary evolution and anisotropic Fe segregation in (0001) textured Ti thin films 2022 Acta Materialia article Materials Science Microstructure and mechanical properties Open access 13 citations Influence of ion irradiation-induced defects on phase formation and thermal stability of Ti0.27Al0.21N0.52 coatings 2022 Acta Materialia article Engineering Metal and Thin Film Mechanics Open access 15 citations Dense Ti0.67Hf0.33B1.7 thin films grown by hybrid HfB2-HiPIMS/TiB2-DCMS co-sputtering without external heating 2021 Vacuum article Engineering Metal and Thin Film Mechanics Open access cited by 1 patent 18 citations Microstructure, Grain Boundary Evolution and Anisotropic Fe Segregation in (0001) Textured Ti Thin films 2021 SSRN Electronic Journal preprint Materials Science Microstructure and mechanical properties Open access 0 citations 5 results References 0