January 20, 2012 article Study on shop floor control system in semiconductor fabrication by self-organizing map-based intelligent multi-controller Computers & Industrial Engineering DOI: 10.1016/j.cie.2012.01.004 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 18 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access A Basic Description Logic for Service-Oriented Architecture in Factory Planning and Operational Control in the Age of Industry 4.0 2023 Applied Sciences article Engineering Flexible and Reconfigurable Manufacturing Systems Open access 9 citations 1 result References 0