January 01, 2009 book Low Pressure Plasmas and Microstructuring Technology Springer eBooks DOI: 10.1007/978-3-540-85849-2 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 77 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access In situ X-ray measurements over large Q-space to study the evolution of oxide thin films prepared by RF sputter deposition 2020 Journal of Materials Science article Materials Science Ferroelectric and Piezoelectric Materials Open access 4 citations 1 result References 0