CAMERA-BASED INTERFERENCE FRINGE METROLOGY WITH SUPERRESOLUTION FOR LASER BEAM ANGLE AND ABSOLUTE FREQUENCY MEASUREMENT
Abstract
A method for measuring an interference fringe period of interference fringes from two combined laser beams includes imaging the combined beams with first and second digital image sensor arrays to produce first and second images, where a spatial period of pixels of the first and second arrays is greater than a fringe spatial period of the interference fringes, resulting in a first and second periodic intensity modulation pattern in the first and second images due to a spatial sub-sampling aliasing effect; calculating, up to an integer ambiguity, a value of the interference fringe spatial period, from the first periodic intensity modulation pattern and from the spatial period of the pixels of the first array; and resolving the integer ambiguity using the first and second periodic intensity modulation patterns and characteristics of the first and second arrays, thereby determining the interference fringe period with no integer ambiguity.
Inventors 3
- Wolfgang Löffler Aachen author as filed: Löffler, Wolfgang
- Lipeng Wan Aachen author as filed: Wan, Lipeng
- Visimberga, Giuseppe
Inventors are linked to an Aachen author when surname and first name match exactly one author.
Applicants
- UNIVERSITEIT LEIDEN GBS Leiden
Cited papers 0 in the database
Non-patent literature as cited (2)
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- - DORRÍO B V ET AL: "REVIEW ARTICLE; Phase-evaluation methods in whole-field optical measurement techniques", MEASUREMENT SCIENCE AND TECHNOLOGY, IOP, BRISTOL, GB, vol. 10, no. 3, 1 March 1999 (1999-03-01), pages R33 - R55, XP020064718, ISSN: 0957-0233, DOI: 10.1088/0957-0233/10/3/005