NOVEL ATOMIC FORCE MICROSCOPY PROBES WITH PHONONIC CRYSTALS
Espacenet
Family 70155242
Abstract
The present invention is in the field of an atomic force microscopy probe, which probes generally consist of four cooperating elements, namely a sharp tip to sense the surface, an optical resonator usually being a cavity, a drive usually being a piezoelectric, and a read out usually being a laser beam and a photodiode to measure deflection, a sensor comprising said probe, and a method of fabricating said probe.
Inventors 4
- Groeblacher, Simon
- Milan P. Allan Aachen author as filed: Allan, Milan P
- Norte, Richard Alexander
- Maarten Leeuwenhoek Aachen author as filed: Leeuwenhoek, Maarten
Inventors are linked to an Aachen author when surname and first name match exactly one author.
Applicants
- TECHNISCHE UNIVERSITEIT DELFT
- UNIVERSITEIT LEIDEN GBS Leiden
- Univ Delft Tech
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No literature citations.